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iHBC-1 13:30-14:00

Low Distortion Wafer Bonding using programmable wafer deflection for advanced semiconductor manufacturing

Dr. Li GONG

General Manager, SUSS MicroTec (Shanghai) LTD

Abstract:

Speaker's Biography:

Dr. L. Gong has studied material sciences at the university Erlangen - Nuernberg Germany. He has joint Fraunhofer Institute for Integrated Circiuts in Erlangen in 1987. His main research fields were semiconductor process technologies and measurement techniques. He has published over 20 scientific papers in magazines and international conferences. He has received the ph. D from the university Erlangen – Nuernberg in 1993. After many years teaching and research work, he joint Suss MicroTec in 1994. Since 2001 he is the general manager of Suss MicroTec (Shanghai) LTD. Dr. Gong is experienced in the field of semiconductor processes and equipment.